An efficient super-high speed polishing method for CVD diamond films

作者：Zhou, L.; Huang, S. T.^*; Xu, L. F.

来源：International Journal of Refractory Metals and Hard Materials, 2011, 29(6): 698-704.

DOI：10.1016/j.ijrmhm.2011.05.005

• CVD diamond film
• Super-high speed polishing
• Material removal mechanism

In this paper, 0Cr18Ni9 stainless steel was used as the polishing plate material during the super-high speed polishing of CVD diamond films. The influences of polishing speed and polishing pressure on the surface character, material removal rate and material removal mechanism have been studied using scanning electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy before and after polishing, respectively. The results showed that the super-high speed polishing with 0Cr18Ni9 stainless steel polishing plate is an effective polishing method, and while the polishing speed and pressure are 100 m/s and 0.17-0.31 MPa. the material removal rate could reach to 36-51 mu m/h. Furthermore, the material removal mechanism is mainly the chemical reaction between carbon and iron and the diffusion of carbon atoms into the polishing plate during the super-high speed polishing.

• 出版日期2011-11
• 单位沈阳理工大学