Nano-CNC Machining of Sub-THz Vacuum Electron Devices

作者：Gamzina Diana^*; Himes Logan G; Barchfeld Robert; Zheng Yuan; Popovic Branko K; Paoloni Claudio; Choi EunMi; Luhmann Neville C Jr

来源：IEEE Transactions on Electron Devices, 2016, 63(10): 4067-4073.

DOI：10.1109/TED.2016.2594027

• High frequency
• micromachining
• nano-computer numerical control (CNC)
• terahertz
• vacuum electron device (VED)

Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.

• 出版日期2016-10