A 3-axis accelerometer and strain sensor system for building integrity monitoring

作者：Santana J^*; van den Hoven R; van Liempd C; Colin M; Saillen N; Zonta D; Trapani D; Torfs T; Van Hoof C

来源：Sensors and Actuators A: Physical , 2012, 188: 141-147.

DOI：10.1016/j.sna.2011.11.017

• Signal-to-Noise ratio
• Linearity
• Bandwidth
• Sensitivity
• Integrated number of pulses
• Residual motion

An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. An accurate VerilogA model of the sensor was made to improve simulations. The gain of the system is controlled by integrating pulses from the excitation circuit allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41 x 10(-20) F root(W/Hz) was achieved for a sensor range of +/- 2.0 g and +/- 20,000 mu epsilon over a 100 Hz bandwidth. A minimum of 440 nW powerconsumption was recorded. Residual motion artifacts are also cancelled by the system.

• 出版日期2012-12