Amorphous silicon coatings with silver nanoparticles

作者:Tuleushev Yu Zh*; Volodin V N; Zhakanbaev E A; Zdorovets M V
来源:Technical Physics Letters, 2013, 39(11): 998-1000.
DOI:10.1134/S1063785013110242

摘要

We describe a plasma-ion sputtering technology for obtaining amorphous silicon coatings containing dispersed silver nanoparticles with average dimensions of 20-30 nm. Results of X-ray diffraction and electron-microscopic investigations of these coatings are presented, and a possible mechanism of silver nano-particle formation from 2- to 3-nm-sized nanoclusters is considered.

  • 出版日期2013-11

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