A new high detectivity room temperature linear thermopile array with a D* greater than 2 x 10(9) cmHz(1/2)/W based on organic membranes

作者：Haenschke Frank^*; Kessler Ernst; Dillner Ulrich; Ihring Andreas; Schinkel Uwe; Meyer Hans Georg

来源：Microsystem Technologies, 2013, 19(12): 1927-1933.

DOI：10.1007/s00542-013-1764-5

We present a newly designed high-detectivity thermoelectric linear array, based on an organic membrane for use in the room temperature range. The sensor array has 64 individual readable channels and was designed and developed for IR spectroscopy. This detector may be used to infer the condition of lubricants and coolants within a mechanical system, so that they can be replaced when needs be, e.g. determining the age of technical oils of wind power plants in real time. Thus valuable resources can be saved and costly damage to equipment avoided. In order to achieve a D* greater than 2 x 10(9) cmHz(1/2)/W, the sensor was designed and optimized to be operated under vacuum conditions. To minimize the thermal cross talk between individual pixels, the pixels are separated from each other by a 50 mu m slit in the self-supporting organic membrane made of SU-8.

• 出版日期2013-12