Microcantilever with integrated light-emitting Schottky barrier avalanche breakdown diodes

作者:Maniscalco N I*; Ko K D; Toussaint K C; King W P
来源:Micro & Nano Letters, 2012, 7(4): 314-316.
DOI:10.1049/mnl.2011.0708

摘要

The design, fabrication and characterisation of a microcantilever having two back-to-back light-emitting Pt-Si Schottky diodes fabricated near the cantilever free end is reported. Visible light is emitted from the Schottky barrier junctions under reverse bias. The diodes breakdown at a voltage of 100 V and during breakdown the diodes emit light with a peak wavelength near 710 nm. This approach for integrating a light-emitting Schottky diode onto a microcantilever could be used to introduce light into scanning probe or sensing measurements.

  • 出版日期2012-4

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