A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement

作者：Guo Tong^*; Ma Long; Zhao Jian; Dorantes Gonzalez Dante J; Fu Xing; Hu Xiaotang

来源：Optics and Lasers in Engineering, 2011, 49(9-10): 1124-1130.

DOI：10.1016/j.optlaseng.2011.05.011

• Optical array components
• Nanomeasuring machine (NMM)
• White light scanning interferometry
• Tilt scanning
• Large range measurement

White light vertical scanning interferometry (VSI) has been well developed during the past two decades and it is well suited for optical component evaluation due to its non-contact nature. However, because of its inherent limits in the field of view, the VSI is incapable of performing large range measurements. For large surfaces, stitching must be employed. In this paper, a nanomeasuring machine (NMM) based white light tilt scanning interferometer (TSI) is described, which can evaluate an optical array component in one round, without the need for stitching. By integrating a NMM, the tilt angle in the TSI no longer will require to be calibrated, easing in this way the realization of the TSI. With a tilt stage mounted on the NMM, the proposed system has two angles related to the measurement, which can provide excellent "fringes slipping out" correction ability. The analysis and the experiments are given.

• 出版日期2011-10
• 单位天津大学