Aberration compensation in aplanatic solid immersion lens microscopy

作者:Lu Yang; Bifano Thomas; Uenlue Selim; Goldberg Bennett*
来源:Optics Express, 2013, 21(23): 28189-28197.
DOI:10.1364/OE.21.028189

摘要

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA similar to 3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

  • 出版日期2013-11-18