An analytical study of the effect of a support geometry on frequency shift and support loss of piezoelectric ring-shaped resonators for healthcare and environmental applications

作者：Wang Dong F^*; Sagawa Takahisa; Lu Jian; Maeda Ryutaro

来源：Microsystem Technologies, 2013, 19(4): 503-508.

DOI：10.1007/s00542-012-1632-8

Ring-shaped resonators with one support have been designed in this work. The ring-shaped resonator reacts with a mass perturbation to provide eigenstate or frequency shifts which could transfer to electrical signals by piezoelectric effect. The aforementioned ring-shaped resonator is mainly comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on the silicon-on-insulator wafer and expected to be a contour mode. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the theoretical analysis was conducted by ANSYS from two aspects including: (a) the effect of support geometry on frequency shift and support loss (from view point of vibration mode shape); and (b) the mass application methodology. It is found that low-amplitude vibration area is smaller at narrow support, and frequency shift of trapezoid support is higher than that of rectangle support.

• 出版日期2013-4