Flexible field emitter arrays with adjustable carbon nanotube distances and bundle generation

作者：Yilmazoglu O^*; Popp A; Pavlidis D; Schneider J J

来源：JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28(2): 268-272.

DOI：10.1116/1.3298889

• carbon nanotubes
• cathodes
• chemical vapour deposition
• field emitter arrays
• nanoelectronics
• nanofabrication
• nanotube devices
• self-assembly
• triodes

A template assisted technique was used to synthesize carbon nanotubes (CNTs) in a highly ordered manner by a noncatalytic chemical vapor deposition technique. Special self-organized anodic alumina films control the syntheses of highly aligned carbon nanotube arrays with desired tube geometry, adjustable intertube distances, and unique CNT bundle generation, which are extremely important for CNT array optimization with high field enhancement factors and high current densities. These CNT arrays also meet industrial demands such as uniformity, low cost, and easy preparation. The CNT bundle generation was adjusted by the CNT tube-diameter, wall-thickness, and length-controlled growth. Field emission tests showed that the turn-on field of the CNT cathode arrays could be lowered by adjusting the intertube distance. A vacuum field emission triode with self-aligned gate using these CNT arrays as field emitter is also presented. The proposed CNT configuration allows the realization of cathode arrays on flexible substrates and is very promising for improving the characteristics of such devices. Moreover, micro/nanointegration opens the possibility for their mass production.

• 出版日期2010-3