摘要
We utilize alloying of Ti/Ni multilayers to prepare Ti-Ni alloy films and investigate effects of modulation period (lambda) on the alloying and mechanical properties. It is found that the annealed multilayers with the lambda of 2.7-54 nm exhibit ultra-high hardness, far exceeding co-sputtering Ti-Ni alloy films, and the maximum hardness is found at lambda=5.4 nm. Attractively, another anomalous hardness softening occurs at lambda of 13.5 and 27 nm with increase of indentation depth besides the softening at lambda=5.4 nm, which is simultaneously accompanied by the pop-in events including displacement jumps and sudden drop of load. The pop-in events are attributed to stress-induced martensitic phase transformation and the critical load for martensitic transformation increases with the decrease of lambda.