A mass sensor based on 3-DOF mode localized coupled resonator under atmospheric pressure

作者：Wang, Yuan^*; Zhao, Chun; Wang, Chen; Cerica, Delphine; Baijot, Mathieu; Xiao, Qijun; Stoukatch, Serguei; Kraft, Michael

来源：Sensors and Actuators A: Physical , 2018, 279: 254-262.

DOI：10.1016/j.sna.2018.06.028

• MEMS resonant sensors
• 3-DOF coupled resonator
• Mode localization
• Mass sensing
• Reversibility
• Magnetic nanoparticles

In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatically coupled resonator is investigated and characterized under atmospheric pressure. A reversible method is used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Furthermore, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, resonance vibration amplitude change and resonance vibration amplitude ratio. MATLAB/SIMULINK and COMSOL Multiphysics models for the 3-DoF coupled resonator system are presented. The simulation results and theoretical calculations are in good agreement with the experimental data. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications.

• 出版日期2018-8-15
• 单位肇庆学院