Modeling and design of a fully integrated gas analyzer using a mu GC and NEMS sensors

作者：Martin O; Gouttenoire V; Villard P; Arcamone J; Petitjean M; Billiot G; Philippe J; Puget P; Andreucci P; Ricoul F; Dupre C; Duraffourg L; Bellemin Comte A; Ollier E; Colinet E; Ernst T^*

来源：Sensors and Actuators B: Chemical , 2014, 194: 220-228.

DOI：10.1016/j.snb.2013.12.075

• Gas sensor
• MEMS
• NEMS
• Nano Electro Mechanical Systems
• Chromatography column
• Modeling

In this work, a comprehensive, predictive and quantitative model of a whole gas analyzer is provided in order to facilitate the design of such high performance devices. All the pre-analytical (gas separation) and analytical (detection and readout) stages have been modeled and experimentally calibrated. Heterogeneous simulations have been used to quantify the impact of the whole architecture on the output characteristic of the gas analyzer. Finally, the model of the NEMS sensor and the chromatography micro-column assembly has been experimentally validated with TEOX (toluene, ethylbenzene, octane, and xylene) gases.

• 出版日期2014-4
• 单位中国地震局