A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation tests

作者：Wei Pal Jen; Liang Wen Long; Ai Chi Fong; Lin Jen Fin^*

来源：Nanotechnology, 2009, 20(2): 025701.

DOI：10.1088/0957-4484/20/2/025701

Indentation forces, including constant rate and oscillating mode, were applied to SiO(2)/Si and diamond-like carbon ( DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.

• 出版日期2009-1-14