Application of confocal technology based on polycapillary X-ray optics in three-dimensional diffraction scanning analysis

作者：Sun, Tianxi^*; Liu, Hehe; Liu, Zhiguo; Peng, Song; Ma, Yongzhong; Sun, Weiyuan; Luo, Ping; Ding, Xunliang

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2014, 323: 25-29.

DOI：10.1016/j.nimb.2014.01.013

• Polycapillary X-ray optics
• Confocal X-ray diffraction
• Three-dimensional diffraction scanning analysis

The confocal technology based on a polycapillary focusing X-ray lens in the excitation channel and a polycapillary parallel X-ray lens in the detection channel was used to perform three-dimensional energy dispersive X-ray diffraction scanning analysis of a copper film on a silicon substrate. A theoretical model of correcting the intensity of the diffracted X-rays from different parts of the sample in the confocal volume was designed. The point-to-point 3D diffraction information of the sample was obtained.

• 出版日期2014-3-15
• 单位北京市辐射中心; 北京师范大学