A spectral interferometric method to measure thickness with large range

作者：Xiao, Qing; Wang, Jiangang; Zeng, Shaoqun^*; Luo, Qingming

来源：Optics Communications, 2009, 282(15): 3076-3080.

DOI：10.1016/j.optcom.2009.05.023

• Spectral interferometry
• Thickness measurement
• Large range
• Optical path difference

We present a spectral interferometric method to measure the thickness of an optical plate or a film with a single layer. The system is based on the Michelson interferometer configuration, and the spectral interference signal of a broadband light source is recorded by a spectrometer. The optical path difference (OPD) between two interfering beams can be obtained by Fourier transform from the spectral interferogram. Gaussian fitting is used to find the exact peak of fringe to enhance the precision of the measurements. When the sample is inserted into the sample beam, the film's thickness can be calculated by comparing the change of OPD, provided that the sample group refractive index is known. Only a single measurement is needed to determine a film's thickness after the initial OPD of the system is calibrated. As no moving parts are required, the system has good stability. In particular, a large range of thicknesses, from micrometers up to several millimeters, can be measured. Such a large range is valuable for optical measurements. For demonstration, we measured the thicknesses of preservative film, cover glass and carrier glass, which were 9.6 +/- 0.55, 156.1 +/- 0.75, 1008.44 +/- 0.96 mu m, respectively.

• 出版日期2009-8-1
• 单位华中科技大学