科研之友
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摘要
In the present paper, optical fibers are used as focusing unit in the process of laser surface texturing, which can effectively decrease the area of the focused facular point. An original experimental equipment was built and described. Micro-textures of parallel grooves and meshed textures were produced on silicon surface. Extensive experiments proved that micro-marking of 2-3 mu m could be etched with proper focusing distance.
- 出版日期2009-5
- 单位清华大学
