Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis

作者：Senin Nicola^*; Blunt Liam A; Tolley Martin

来源：Proceedings of the Institution of Mechanical Engineers - Part B: Journal of Engineering Manufacture , 2012, 226(A11): 1819-1832.

DOI：10.1177/0954405412461240

• Dimensional metrology
• surface metrology
• structured surfaces
• micro parts

A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.

• 出版日期2012-11