A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning - Part 1. Kinematics and design for fabrication

作者：Yao Qing; Dong Jingyan; Ferreira Placid M^*

来源：Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2008, 32(1): 7-19.

DOI：10.1016/j.precisioneng.2007.03.001

• nanopositioning
• parallel-kinematics
• flexure stage
• kinematic analysis
• stage design

Multi-axis micro and nanopositioning systems are increasingly used in much of the metrology and process equipment related to the field of nanotechnology. This, the first of a two-part series of papers on a novel piezo-driven, parallel-kinernatics XYZ nanopositioning (PKXYZNP) stage, concentrates on the development of a viable scheme to achieve pure spatial translation. First, the mechanism is shown to admit closed-form solutions to both; the forward and reverse kinematic problems. The Jacobian and the dynamics of the system indicate that the mechanical structure produces a relatively large work volume, and is capable of high bandwidth and uniform performance across it. The fabrication of the system is described along with some basic testing of its Jacobian and its modal frequencies. Using capacitive gages, the stage is capable of about 85 mu m of motion along each axis with a resolution of about 2-4 nm. The controls, testing and performance are discussed in detail in the companion paper [Dong J, Yao Q, Ferreira PM. A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning. Part 2. Dynamics, control and performance analysis. Precis Eng].

• 出版日期2008-1