Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range

作者：Klyui N I^*; Liptuga A I; Lozinskii V B; Lukyanov A N; Oksanich A P; Terban V A

来源：Technical Physics Letters, 2012, 38(7): 609-612.

DOI：10.1134/S106378501207005X

The effect of treatments in plasmas of different gases and subsequent deposition of diamond-like carbon films (DCFs) on the transmission of semi-insulating GaAs crystals in the IR spectral range has been analyzed. It is shown that deposition of 1- to 1.5-mu m DCFs makes it possible to increase the GaAs transmission in the range of 4-15 mu m and that preliminary treatment in H+ or Ar+ plasma increases the optical transmission of the DCF-GaAs structure. A mechanism is proposed to explain the effect of plasma treatment on the optical transmission of semi-insulating GaAs in the IR spectral range.

• 出版日期2012-7