A white light interference-based atomic force probe scanning microscopy

作者：Wang, Shuzhen^*; Xie, Tiebang; Chang, Suping

来源：Measurement Science and Technology, 2011, 22(4): 045502.

DOI：10.1088/0957-0233/22/4/045502

• atomic force probe scanning microscopy
• white light interference
• nonlinearity error correction
• combining contact mode
• high-precision surface

Novel atomic force probe scanning microscopy combined with white light interference is proposed, in which the deflection of the cantilever is obtained by measuring the movement of the white light interference central fringe. The relationship between the deflection of the atomic force probe cantilever and the movement of the central fringe is analyzed, and the nonlinearity error correction method of probe cantilever deflection measurement is given. A contact operation mode which combines the displacement of the vertical scanning system and the deflection of the cantilever is presented. The self-developed AFM head can be calibrated directly by the laser interferometer of the vertical scanning system. It can be used to measure high-precision engineering surface, optical surface and micro/nanometer surface. Many experiments on the system for a gauge block surface and hard disk surface measurement are conducted, and standard gratings are used to verify the feasibility and performance of the developed method and system.

• 出版日期2011-4
• 单位华中科技大学; 洛阳理工学院