Dense Arrays of Uniform Submicron Pores in Silicon and Their Applications

作者：Brodoceanu Daniel; Elnathan Roey; Prieto Simon Beatriz; Delalat Bahman; Guinan Taryn; Kroner Elmar; Voelcker Nicolas H^*; Kraus Tobias

来源：ACS Applied Materials & Interfaces, 2015, 7(2): 1160-1169.

DOI：10.1021/am506891d

• porous silicon
• SALDI substrates
• antireflective surfaces
• colloidal lithography
• metal-assisted chemical etching
• polymer fiber arrays

We report a versatile particle-based route to dense arrays of parallel submicron pores with high aspect ratio in silicon and explore the application of these arrays in sensors, optics, and polymer micropatterning. Polystyrene (PS) spheres are convectively assembled on gold-coated silicon wafers and sputter-etched, resulting in well-defined gold disc arrays with excellent long-range order. The gold discs act as catalysts in metal-assisted chemical etching, yielding uniform pores with straight walls, flat bottoms, and high aspect ratio. The resulting pore arrays can be used as robust antireflective surfaces, in biosensing applications, and as templates for polymer replica molding.

• 出版日期2015-1-21