A two-dimensional modelling study of a coaxial plasma waveguide

作者：Rahimi S^*; Jimenez Diaz M; Hubner S; Kemaneci E H; van der Mullen J J A M; van Dijk J

来源：Journal of Physics D: Applied Physics , 2014, 47(12): 125204.

DOI：10.1088/0022-3727/47/12/125204

• modelling of microwave-induced plasmas
• plasma surface-wave discharge
• plasma transport processes
• plasma electromagnetic wave propagation

We present a two-dimensional (2D) plasma model for a coaxial microwave discharge. The microwave energy at driving frequency of 2.45 GHz is fed into a coaxial configuration in which the plasma acts as an outer conductor in such a way that a spatially extended surface wave is created. This geometry permits large surface treatment, especially if a set of such coaxial lines are used. The 2D model describes the plasma as a two-temperature non-chemical equilibrium fluid sustained by electromagnetic surface waves. We present results for argon as a working gas. The importance of wave-plasma power coupling and electron heat transport is discussed. The radial localization of electron density in the coaxial plasma waveguide is observed and compared with experimental results. Moreover, a parameter study allows one to investigate the dependence of radial contraction of the electron density as a function of pressure in the range 2-8 mbar, and also the dependence of electron density with power input in the range 120-1200W. In order to verify the model, the modelling results are compared with experimental results for the electron density and temperature and good agreement is found.

• 出版日期2014-3-26