科研之友
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摘要
A general coherent gradient sensor (CGS) system without temperature constraint has been investigated for the measurement of curvatures and nonuniform curvatures changes in film-substrate systems. According to a strict mathematical derivation with the wave nature of light, systematic absolute error limit and relative error limit of the CGS system are presented at arbitrary temperature. It is found that with the decrease of the ambient temperature, the systematic relative error limit increases with a negative exponential law.
- 出版日期2013-7
- 单位兰州大学
