摘要

We describe a design methodology for synthesizing polarization-sensitive diffractive optical elements based on two-dimensional form-birefringent microstructures. Our technique yields a single binary element capable of producing independent phase transformations for horizontally and vertically polarized illumination. We designed two elements for operation at 10.6 mum and fabricated them in silicon. Qualitative experimental results agree with design predictions.

  • 出版日期2004-11-10