Application of micro solid immersion lens as probe for near-field scanning microscopy

作者：Assafrao A C^*; Kumar N; Wachters A J H; Pereira S F; Urbach H P; Brun M; Olivier Segolene

来源：Applied Physics Letters, 2014, 104(10): 101101.

DOI：10.1063/1.4867460

We present an experimental and theoretical study of the immersing properties of a micron-sized solid immersion lens (mu-SIL) and evaluate its capabilities of functioning as a near-field probe. It was found that the mu-SIL reduces an impinging focused spot by a factor of approximately its refractive index, similarly to a macroscopic solid immersion lens. This reduced immersed spot is used to investigate the visibility of a periodic grating structure. Results show an improvement in the visibility by approximately 30% when compared to confocal microscopy, demonstrating the potential application of these tiny micro-lenses as a near-field probe in scanning microscopy and other high-resolution optical systems.

• 出版日期2014-3-10
• 单位中国地震局