Microfabricated environmental barrier using ZnO nanowire on metal mesh

作者：Shin Young Min; Lee Seung Ki; Lee Joo Yong; Kim Jun Ho; Park Jae Hyoung^*; Ji Chang Hyeon

来源：Journal of Micromechanics and Microengineering, 2013, 23(12): 127001.

DOI：10.1088/0960-1317/23/12/127001

In this study, a waterproof environmental barrier for microsensor package has been developed using metal mesh covered with zinc oxide (ZnO) nanowire. A near superhydrophobic surface with two-dimensional array of holes has been fabricated by hydrothermal growth of ZnO nanowire on an off-the-shelf steel use stainless (SUS) mesh. For a twill-woven SUS wire mesh having wire thickness of 30 mu m and gap of 33 mu m, a maximum contact angle of 160.40 degrees and a minimum contact angle hysteresis of 15.23 degrees have been achieved using ZnO nanowire grown on the wire surface and further deposition of FC film. The mesh was able to withstand a maximum water pressure of 2,459.8 Pa. The measured height of ZnO nanowire was approximately 2-3 mu m. The fabricated SUS mesh covered with ZnO nanowire has been assembled with a microphone package, and waterproof characteristics have been measured by cyclic dipping test at various water levels. For a microphone package having two acoustic ports on top and bottom covered with fabricated mesh, no visible change in acoustic characteristics has been observed up to 1,372.9 Pa of water pressure. Total volume of the package was 6.8 x 9.8 x 1.9 mm(3).

• 出版日期2013-12