Development and Test of Model Apparatus Utilizing HTS Magnetic Levitation for Non-Contact Spinning Clean-Up Processors of Photo Mask Production

作者：Saito Kimiyo^*; Fukui Satoshi; Ogawa Jun; Oka Tetsuo; Sato Takao; Sorimachi Satoshi; Miyazaki Shinsuke

来源：IEEE Transactions on Applied Superconductivity, 2011, 21(3): 2241-2244.

DOI：10.1109/TASC.2010.2081655

• Bulk HTS
• magnetic levitation
• spin processor

It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.

• 出版日期2011-6