科研之友
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摘要
We presented a miniaturized surface plasmon resonance (SPR) chip composed of a bulk micromachined silicon coupling prism, metal membrane, and microfluidic channels which were made with polymer replication techniques. The silicon prism arrays with base angle of 54.74° or 25.24° were fabricated using mask and maskless anisotropic wet etching in KOH solution. The experimental data and simulated results in the wavelength of 1550, nm show that the SPR resonance angles measured in air, water and ethanol were approximately 16.75°, 22.58° and 22.72°, respectively, much lower than those of the glass prism coupled SPR sensor. The results are helpful to establish conditions of silicon platform SPR excitation using near-infrared ray (NIR) and to make progress in developing a miniaturized SPR platform for biomedical TAS with low cost and good performance.
