摘要

We have developed a compact electron beam ion trap (EBIT) with a high-Tc superconducting magnet. The electron energy range of the new EBIT is 100-2500 eV, which enabled us to downsize the device. The performance of the compact EBIT has been investigated through extreme ultra-violet (EUV) spectroscopy of highly charged iron ions and visible spectroscopy of highly charged tungsten ions.