A High-Reliability High-Linearity High-Power RF MEMS Metal-Contact Switch for DC-40-GHz Applications

作者：Patel Chirag D^*; Rebeiz Gabriel M

来源：IEEE Transactions on Microwave Theory and Techniques, 2012, 60(10): 3096-3112.

DOI：10.1109/TMTT.2012.2211888

• Contact switch
• electrostatic relay
• gradient insensitive
• hard metal contact
• high contact force
• RF microelectromechanical systems (MEMS)
• stress insensitive

This paper presents an mN-level contact and restoring force RF microelectromechanical systems metal-contact switch exhibiting high reliability, high linearity, and high power handing for dc-40-GHz applications. The device, which is insensitive to stress and temperature effects, achieves 1.2-1.5 mN of contact force (per contact) from 80 to 90 V and 1.0 mN of restoring force (per contact). The up-state capacitance is 8 fF, resulting in an isolation of 46, 31, and 14 dB at 1, 6, and 40 GHz, respectively. Measured results show switch resistances of 1-2 Omega and a reliability of >100 million cycles at 2-5 W under cold switching at 100 mW under hot-switching conditions, in an unpackaged and standard laboratory environment. Furthermore, the device was tested under prolonged hold-down conditions and demonstrated excellent RF power handling (>10 W) and dc current handling (>1 A) capability.

• 出版日期2012-10