Nanostructure and strain analysis of CeO2/YSZ strained superlattice

作者：Kiguchi Takanori^*; Konno Toyohiko J; Wakiya Naoki; Morioka Hitoshi; Saito Keisuke; Shinozaki Kazuo

来源：Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2010, 173(1-3): 220-228.

DOI：10.1016/j.mseb.2010.02.013

• YSZ
• Ceria
• Superlattice
• Strain
• Geometric phase analysis
• Transmission electron microscopy

In this study, the nanostructure and the strain fields in the superlattice [CeO2/YSZ](5) fabricated on the SiO2/Si(001) substrate were investigated macroscopically and nanoscopically using X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) with geometric phase analysis (GPA) and related methods. The XRD analyses elucidated that the out-of-plane lattice parameter of CeO2 and YSZ layers is relaxed. However, the in-plane lattice parameter is almost identical. Results of HRTEM and related analyses revealed that CeO2 and YSZ layers form a superlattice structure. Results show that the superlattice has some defect structure, such as misorientation, varied thickness of CeO2 and YSZ layers, varied artificial periodicity, and interface roughness. However, the out-of-plane lattice parameter has periodicity corresponding to the superlattice structure. The in-plane lattice parameter is also equal to the local deviation. Therefore, the strain effect in the superlattice persists to some degree.

• 出版日期2010-10-15