New materials for micro-scale sensors and actuators An engineering review

作者：Wilson Stephen A^*; Jourdain Renaud P J; Zhang Qi; Dorey Robert A; Bowen Chris R; Willander Magnus; Wahab Qamar Ul; Willander Magnus; Safaa M Al hilli; Nur Omer; Quandt Eckhard; Johansson Christer; Pagounis Emmanouel; Kohl Manfred; Matovic Jovan; Samel Bjorn; van der Wijngaart Wouter; Jager Edwin W H; Carlsson Daniel; Djinovic Zoran; Wegener Michael; Moldovan Carmen; Iosub Rodica; Abad Estefania; Wendlandt Michael; Rusu Cristina; Persson Katrin

来源：Materials Science and Engineering: R: Reports , 2007, 56(1-6): 1-129.

DOI：10.1016/j.mser.2007.03.001

• piezoelectric
• magnetic
• shape memory
• polymer
• microstructure
• microtechrology

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology.

• 出版日期2007-6-21