科研之友
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摘要
Organic electronic devices such as thin film transistors are usually manufactured by thermal evaporation of organic semiconductors out of an effusion cell under high vacuum conditions. In the present work a mathematical model of a coating plant is developed. It covers the transient evaporation of the organic semiconductors as well as the thermal behaviour of the evaporation cell and the growth of thin films. The model is intended to serve as a basis for model based controller designs.
- 出版日期2013-12
