Lanthanide "second-generation" precursors for MOCVD applications: Effects of the metal ionic radius and polyether length on coordination spheres and mass-transport properties

作者：Malandrino G; Fragala IL^*

来源：Coordination Chemistry Reviews, 2006, 250(11-12): 1605-1620.

DOI：10.1016/j.ccr.2006.03.017

• MOCVD
• rare-earth
• adducts
• volatility
• thermal stability
• thin films

The panorama of trishexafluoroacetylacetonato polyether complexes of rare-earth metals is considered. The methods of preparation have been classified according to the nature of the starting rare-earth metal. The relationship between the coordination sphere and mass-transport properties is discussed as well as applications of these adducts to metal organic chemical vapor deposition (MOCVD) processes of rare-earth containing films. This review represents the first comprehensive study of the "second-generation" MOCVD rare-earth metal precursors from syntheses to applications.

• 出版日期2006-6