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摘要
This paper studies two models for estimating cutting depth of multi-pass nanoscale cutting by using an atomic force microscopy (AFM) probe. One estimates cutting depth for multi-pass nanoscale cutting by using regression equations of nano scale contact pressure factor (NCP factor) while the other uses equation of specific down force energy (SDFE). This paper proposes taking a diamond-coated probe of AFM as the cutting tool to carry out multi-pass nanoscale cutting experiments on the surface of sapphire substrate. In the process of experimentation, different down forces are set, and the probe shape of AFM is known, then using each down force to multi-pass cutting the sapphire substrate. From the measured experimental data of a central cutting depth of the machining groove by AFM, this paper calculates the specific down force energy of each down force. The experiment results reveal that the specific down force energy of each case of multi-pass nanoscale cutting for different down forces under a probe of AFM is close to a constant value. This paper also compares the nanoscale cutting results from estimating cutting depths for each pass of multi-pass among the experimental results and the calculating results obtained by the two theories models. It is found that the model of specific down force energy can calculate cutting depths for each nanoscale cutting pass by one equation. It is easier to use than the multi-regression equations of the nanoscale contact pressure factor. Besides, the estimations of cutting depth results obtained by the model of specific down force energy are closer to that of the experiment results. It shows that the proposed specific down force energy model in this paper is an acceptable model.
- 出版日期2012-3-1
