A normal-incidence PtSi photoemissive detector with black silicon light-trapping

作者:Steglich Martin*; Zilk Matthias; Bingel Astrid; Patzig Christian; Kaesebier Thomas; Schrempel Frank; Kley Ernst Bernhard; Tuennermann Andreas
来源:Journal of Applied Physics, 2013, 114(18): 183102.
DOI:10.1063/1.4829897

摘要

A normal-incidence light-trapping scheme relying on black silicon surface nanostructures for Si-based photoemissive detectors, operating in the IR spectral range, is proposed. An absorptance enhancement by a factor of 2-3 is demonstrated for technologically most relevant, ultrathin (2 nm-3 nm) PtSi rear layers on Si. It is shown that this increase can be translated into an equivalent increase in responsivity because of the absorption limitation of detector performance. Pd2Si/p-Si detectors with black silicon are suggested as promising candidates for room temperature detection in the third optical window with an expected external quantum efficiency in the range of 9%-14%.

  • 出版日期2013-11-14