Atomic layer deposition of MgO films on yttria-stabilized zirconia microtubes

作者：Part Marko^*; Tamm Aile; Kozlova Jekaterina; Maendar Hugo; Taette Tanel; Kukli Kaupo

来源：Thin Solid Films, 2014, 553: 30-32.

DOI：10.1016/j.tsf.2013.11.069

• Atomic layer deposition
• Sol-gel
• MgO
• Yttria stabilized zirconia (YSZ) microtubes

Deposition of MgO thin film on nanocrystalline yttria-stabilized zirconia microtubes was investigated. The microtubes were prepared by self-formation from threads drawn directly from zirconium butoxide [Zr(OBu)(4)] precursor and heat treated at 800 degrees C. The tubes possessed 100% tetragonal phase, their typical outer diameter was 50 mu m, inner diameter 30 mu m and length 1 cm. MgO films were deposited from beta-diketonate-type precursor 2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220 degrees C by atomic layer deposition. Thickness of MgO film on microtubes was 15.8 nm and growth rate 0.105 angstrom/cycle.

• 出版日期2014-2-28