A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives

作者：Yuan Yanhui; Du Hejun^*; Wang Shao

来源：Microsystem Technologies, 2010, 16(6): 931-940.

DOI：10.1007/s00542-010-1038-4

A miniature in-plane pizoresistive MEMS accelerometer was designed, fabricated and characterized for detection of slider off-track motion in hard disk drives. The structure of the accelerometer consists of a central supporting beam and two stress-magnifying sensing beams. Under geometric constraints imposed by the trailing side of a pico slider, the accelerometer design was optimized to achieve approximately pure axial deformation in the sensing beams and a maximum sensitivity with a specified natural frequency of 300 kHz. Fabricated on a silicon-on-insulator (SOI) wafer, the accelerometer with a half Wheatstone bridge was wirebonded to external pads and interfaced with an amplifier circuit on a printed circuit board (PCB). The noise level, sensitivity, nonlinearity were characterized with vibration testing on a shaker. The miniature accelerometer (1 x 0.3 x 0.3 mm(3)) with a weight of only 0.2 mg offers a much higher resonant frequency with a comparable sensitivity compared with those in previous work.

• 出版日期2010-6
• 单位南阳理工学院