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摘要
The paper presents results of plasma polymerised coating deposited from the mixtures of HMDSO monomer with nitrogen on aluminium substrate using plasma reactor based on Diffuse Coplanar Surface Barrier Discharge (DCSBD). Contact angle measurement was used to investigate the optimal deposition parameters. The deposited films were characterized by FTIR and SIMS methods. The corrosion protection of the HMDSO layer was proved by salt water test.
- 出版日期2012
