Depth of focus estimation based on exposure dose distribution

作者：Tan Jiubin; Jin Zhanlei^*

来源：Optics Communications, 2008, 281(8): 2233-2237.

DOI：10.1016/j.optcom.2007.12.040

• exposure dose distribution
• depth of focus estimation
• laser direct writing
• defocusing amount
• intensity distribution

A defocusing exposure dose distribution model is established with the integral effect of light intensity on time taken into account for laser direct writing on a thin photoresist with total reflection substrate. Exposure dose distribution curves are established using the established model for different photoresist depths. A side slope angle is established for each defocusing amount in accordance with the exposure dose distribution curves, and so depth of focus can be estimated by simply checking to see if the maximum side slope angle with the horizontal is in the range of 80-100 degrees. Simulation results indicate that when laser direct writing is done on a thin photoresist with total reflection substrate using a laser with wavelength equal to 442 nm and a lens with numerical aperture equal to 0.5, the depth of focus estimated using the proposed method is 1 mu m, which is just 1/3 of the depth of focus estimated using the method based on intensity distribution. It is therefore concluded that it is the integral effect of light intensity on time that causes the depth of focus estimation error, and the proposed method can be used to achieve a more accurate depth of focus estimation compared to the intensity distribution based method.

• 出版日期2008-4-15
• 单位哈尔滨工业大学