An Improved Design Method of the MEMS-Based Folded-Beam Micromirror

作者：Yan Mei, Li; Qing Hua, Chen; Ying Jun, Chen; Wen Gang, Wu

来源：Applied Mechanics and Materials, 2014, 529: 135-138.

DOI：10.4028/www.scientific.net/amm.529.135

<jats:p>In this paper, the folded-beam torsion MEMS mirror that meets a set of specified constraints was developed. An optimization algorithm that we newly adopted in the RCS(restricted competition selection) GA(genetic algorithm) could overcome some difficulties in single-search algorithms. Moreover, by the proposed method, the designer’s experience, and view and judgment could be reflected effectively.</jats:p>

• 出版日期2014-6
• 单位北京大学