摘要

Microelectromechanical Systems (MEMS) is difficult to take transient analysis due to the tight coupling between the multiple energy domains, typically nonlinear. An effective increment-dimensional precise integration method (PIM) combined with the model order reduction (MOR) technique based on Krylov subspace is present to solve large-scale nonlinear finite element dynamics systems. The numerical example of V-beam electro-thermal actuator is shown to demonstrate that the MOR-PIM method can achieve high precision and fast speed when solving the nonlinear dynamic equation with large-scale freedom.