ALD coated tools in micro drilling of Ti sheet

作者：Giorleo L; Ceretti E; Giardini C

来源：CIRP Annals - Manufacturing Technology, 2011, 60(1): 595-598.

DOI：10.1016/j.cirp.2011.03.011

• Coating
• Surface analysis
• Micromachining

In micro drilling, one of the most important aspects is the quality and homogeneity of the tool surface; because of its dimension, standard coating techniques, such as PVD and CVD, seem to be not enough performing. In the last few years, the development of novel coating techniques, such as Atomic Layer Deposition (ALD), opened new areas for thin layer deposition. In this work the application of ALD coated tools in micro drilling of Ti sheets was tested and characterized. Different analyses were realized in order to measure the homogeneity and the adhesion of coating to the substrate, the tool life, the hole roundness error and the tool wear.

• 出版日期2011