摘要

The oriented Co80Ir20 soft magnetic thin films with adjustable in-plane uniaxial anisotropy field and strong negative magnetocrystalline anisotropy (K-u(grain) ) were fabricated by magnetron sputtering. The oblique angle dependence of the static and high-frequency properties for the oriented Co80Ir20 soft magnetic films was systematically investigated. The results suggest that the in-plane uniaxial anisotropy field (H-u) can be adjusted by changing the oblique angle, while the total out-of-plane anisotropy field remains invariable. With the increase in the oblique angle, the value of Hu varies from 80 to 310 Oe. As a result, the natural resonance frequency (f(r)) significantly increases from 4.6 to 7.9 GHz.