Ultrahigh vacuum deposition of higher manganese silicide Mn4Si7 thin films

作者:Dulal Rajendra P*; Dahal Bishnu R; Pegg Ian L; Philip John
来源:Journal of Vacuum Science and Technology B, 2015, 33(6): 060603.
DOI:10.1116/1.4933083

摘要

The authors have successfully grown one of the higher manganese silicides, Mn4Si7 thin films on silicon (100) substrates using an ultrahigh vacuum deposition with a base pressure of 1 x 10(-9) Torr. The thickness of the film was varied from 65 to 100 nm. These films exhibit a tetragonal crystal structure and display paramagnetic behavior as predicted for the stoichiometric Mn4Si7 system. They have a resistivity of 3.32 x 10(-5) Omega m at room temperature and show a semimetallic nature.

  • 出版日期2015-11