Air damping of micro bridge resonator vibrating close to a surface with a moderate distance

作者：Qiu, Huacheng^*; Schwarz, Patrick; Feili, Dara; Wu, Xuezhong; Seidel, Helmut

来源：Journal of Micromechanics and Microengineering, 2015, 25(5): 055016.

DOI：10.1088/0960-1317/25/5/055016

• micro beam resonator
• fluid-structure interaction
• wall effects
• squeeze film damping
• viscous damping

The vibration of micro resonators is strongly influenced by the hydrodynamics of the surrounding fluid in the vicinity of a rigid wall. While most prior efforts to model this hydrodynamic loading have focused on squeeze film damping with very narrow gaps, in many practical applications, the resonators vibrate close to a surface with a moderate distance. Two recently developed models which deal with this problem are reviewed. Experiments by using a micro bridge resonator with a big range of gaps are performed at controlled gas pressures, and are compared with predictions from these theoretical models. The unsteady Navier-Stokes model yields the best agreement with experiments.

• 出版日期2015-5
• 单位中国人民解放军国防科学技术大学