Stable linear plasma arrays at atmospheric pressure

作者：Wu Chen^*; Hoskinson Alan R; Hopwood Jeffrey

来源：Plasma Sources Science and Technology, 2011, 20(4): 045022.

DOI：10.1088/0963-0252/20/4/045022

A non-thermal microplasma has been intensively investigated because of its ability to generate high electron densities with low gas temperatures, even at atmospheric pressure. This work demonstrates linear arrays of microplasmas generated in atmospheric pressure argon driven by a series of microstrip resonators. Small arrays of such resonators were previously shown to sustain up to five microplasmas, but intrinsically weak coupling between resonators is shown to be insufficient to form wider uniform arrays. An electrical connection between each resonator is shown to enhance the coupling among resonators, allowing arrays composed of at least 88 elements that extend 11 cm in width. The application of coupled-mode theory to this system shows good agreement with measurements of microplasma emission intensity as well as with electromagnetic simulations of these devices. Operation of arrays at microwave frequencies allows a nearby ground electrode to participate in the resonance. These findings may allow for future low-cost plasma processing using roll-to-roll techniques at pressures of one atmosphere.

• 出版日期2011-8