Durability of nitrided fluorocarbon polymer films for nanoimprint lithography

作者：Kim Han Hyoung; Park Se Geun^*; Lee El Hang; Lee Seung Gol; O Beom Hoan

来源：Thin Solid Films, 2011, 519(16): 5490-5493.

DOI：10.1016/j.tsf.2011.03.124

• Anti-sticking layer
• Nano-imprint lithography
• Nano-indentation
• Nitrided fluorocarbon

Hydrophobic fluorocarbon polymer films have been used as anti-sticking and releasing coatings for templates in nano-imprint lithography, but have poor durability against repeated high pressure pressing processes. The addition of nitrogen into fluorocarbon-based gas plasma can provide nitrided fluorocarbon polymer films, as confirmed by Fourier-transform infrared spectroscopy. Fluorocarbon and nitrided fluorocarbon films have almost the same 110.0 degrees contact angle with water drops. The nitrided fluorocarbon films are harder and significantly enhance durability as anti-sticking layers. Durability enhancement has been confirmed by fabricating replicas with silicon templates using nitrided fluorocarbon anti-sticking layers.

• 出版日期2011-6-1