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摘要
The design and performance of piezoresistive MEMS-based MWCNT/epoxy composite strain sensor using COMSOL Multiphysics Toolbox has been investigated. The proposed sensor design comprises su-8 based U-shaped cantilever beam with MWCNT/epoxy composite film as an active sensing element. A point load in microscale has been applied at the tip of the cantilever beam to observe its deflection in the proposed design. Analytical simulations have been performed to optimize various design parameters of the proposed sensor, which will be helpful at the time of fabrication.
- 出版日期2017-7
